XPS is capable of chemical-state analysis and is very useful for structural analysis. Since the information depth by XPS is as thin as about 10 nm, argon-ion sputtering should be used for the analysis of a deep region of samples. However, argon-ion sputtering may suffer damage such as a change in the chemical state depending on the type of sample. It was reported that zirconium oxide was not damaged by argon-ion sputtering, but there has been no report on a zirconium-based chemical conversion coatings. Therefore, in order to utilize XPS for microstructural analysis of zirconium-based chemical conversion coatings, which are widely used as corrosion-resistant coatings on paint bases, etc., possible damage of zirconium-based chemical conversion coatings by argon-ion sputtering was examined. As a result, it was confirmed that the zirconium-based chemical conversion coating was not damaged by argon-ion sputtering.